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Tohoku University Technology: Electron beam modulator and its modulation method: T20-1565

Electron round lens using optical field that can correct spherical aberration.

Since the invention of the electron microscope (EM), electrostatic and magnetic round lenses (with cylindrically symmetric lensing action) have been used in the field of charged particle optics. These lenses in principle incapable of producing negative spherical aberration, which had long limited the spatial resolution of EMs. Modern EMs are equipped with spherical aberration correctors consisting of multipole lenses and achieve angstrom-scale resolution. However, such devices are expensive (over a million dollars) and complicated systems. This invention solves above problems in order to have high precision, simple and low-cost electron beam focusing device. It claims the configuration of electron round lens, including concave lens with positive spherical aberration and convex lens with negative spherical aberration due to cylindrically symmetric polarized light beam.